ASML
Graduation assignment: Investigate high velocity rarefied gas heat loads
Job mission
The latest generation of lithography machines uses light in the extreme ultra violet range. Since light of this wavelength (13.5 nm) is absorbed by any optical medium, reflective optics in a vacuum are used. Any dust particle can potentially ruin the light patterns that are generated in the machines. Therefore, high velocity jets of low pressure gas are used to push contamination away from sensitive modules. But at the same time the pressure needs to be as low as possible allow for maximal EUV transmission.
This leads to a slip-flow condition in the rarified gas regime: the gas flow is now interacting directly with the surface itself and there is no more boundary layer with zero wall velocity. This enhances the interaction of the gas with the surface, such that even at low pressures appreciable amounts of heat can be transferred to the surfaces. Since the next generation of lithography machines needs precision of submodules to be in the order of 10 picometer, even small thermal effects are relevant to design evaluation and need to be estimated to arrive at the desired performance.
Job description
Upgrade an existing setup which has been validated to measure heat loads induced by rarefied gas flows. The measurement system needs to be improved to deal with more complex geometries. From flat parallel plates the setup should be extended to ramps, chokes or possibly periodic structures. You will be responsible for:
- Planning of the experiments; conceptual design of the new parts, define measurement points and required test time. Coordinate new parts delivery.
- Perform the measurements, calibrate and validate the setup, acquire the required data points.
- Analyze and the results, try to match the results to a theoretical frame work or scaling law.
- Document and present the results such that they can be applied in the machine design.
You’ll be working in close collaboration with experienced architect(s) and experts on answering questions currently blocking the design of the next generation lithography tools.
You are a master student in Applied Physics, who is graduating in a field compatible with fluid dynamics. You have good communication skills in English.
This is a graduation internship for 5 days a week with a minimum duration of 6 months. The start date is as soon as possible.
Please keep in mind that we can only consider students (who are enrolled at a school during the whole internship period) for our internships and graduation assignments.
What ASML offers
Your internship will be in one of the leading Dutch corporations, gaining valuable experience in a highly dynamic environment. You will receive a monthly internship allowance of 500 euro (maximum), plus a possible housing or travel allowance. In addition, you’ll get expert, practical guidance and the chance to work in and experience a dynamic, innovative team environment.
ASML: Be part of progress
We make machines that make chips – the hearts of the devices that keep us informed, entertained and safe; that improve our quality of life and help to tackle the world’s toughest problems.
We build some of the most amazing machines that you will ever see, and the software to run them. Never satisfied, we measure our performance in units that begin with pico or nano.
We believe we can always do better. We believe the winning idea can come from anyone. We love what we do – not because it’s easy, but because it’s hard.
Students: Getting ready for real-world R&D
Pushing technology further is teamwork, and our R&D team is more than 5,500 people strong, with major sites on three continents. Dozens of diverse, interdisciplinary teams work in parallel to meet a challenging development schedule.
In such an environment, your colleagues may be sitting next door, or they could be thousands of kilometers away in a different country, or even working for a different company.
An internship at ASML is your opportunity to get to know this world of industrial-strength R&D and get a feel for that excites you most. Will you design a part of the machine, or make sure it gets built to the tightest possible specifications? Will you write software that drives the system to its best performance, or work side-by-side with the engineers of our customers in a fab, optimizing a system to the requirements of the customer?