ASML
Internship: Investigate optical aberrations using correlation-based diagnostics
Job Mission
ASML is the world’s leading lithography equipment supplier. The “Image Sensing” group within the Development & Engineering (D&E) department in Veldhoven consists of about 28 highly skilled and motivated engineers. The group is responsible for development and maintenance of the sensors that detect the quality and position of the aerial image of the reticle. These sensors are used in the deep UV machines for Reticle Align, Reticle Heating Control and advanced System Diagnostics.
Job Description
In ASML DUV scanners, optical aberrations of the projection lens are measured with an optical interferometric based image sensor. A single measurement returns the optical aberrations (Zernikes) on multiple positions in the object plane of the lens. By repeating a measurement many times a repeatability data set is obtained. The correlations in this data set, between different Zernikes and/or different measurement positions, can be used to pinpoint the source of variations. Your assignment will be to work out this concept into an actual software tool, and demonstrate the diagnostics on actual data sets.
You are a Master student in Applied Physics in your final year, looking for a graduation assignment. You have good communication skills and you are fluent in English. You are independent, and able to think out-of-the-box. Experience with Matlab is required.
This is a graduation assignment for 5 days a week with a duration of 6 – 9 months. The start date is as soon as possible.
Please keep in mind that we can only consider students (who are enrolled at a school during the whole internship period) for our internships and graduation assignments.